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File: lecture_13.pdf
This OER is part of OCW: Multi-Scale System Design
Published under: /Lecture Notes
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Inherited Tag(s):
- mechanical engineering
- scale
- complexity
- nano
- micro
- meso
- or macro-scale
- kinematics
- metrology
- engineering modeling
- motion
- modeling
- design
- manufacture
- design principles
- fabrication process
- functional requirements
- precision instruments
- nanomanipulators
- fiber optics
- micro- photonics
- nano-photonics
- nanorobotics
- mems
- piezoelectric
- transducer
- act
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